UC Berkley: Electrical Engineering C245

This entry is part 5 of 6 in the series Electrical Engineering

A series of 26 lectures organized by UC Berkley

Course Intro:
Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS

Series NavigationElectrical Engineering C245UC Berkley: Electrical Engineering 141

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