Electrical Engineering C245

This entry is part 4 of 6 in the series Electrical Engineering

A series of 26 lectures about Electromechanical Systems (MEMS) organized by UC Berkley.

Course Description:
Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS

Series NavigationMIT 6.002 Circuits and ElectronicsUC Berkley: Electrical Engineering C245

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